Semiconductor special cylinder: semiconductor automation equipment to achieve precision transfer, precision transmission of the core standard accessories.
In high-end manufacturing processes such as semiconductor wafer processing, photolithography and etching, thin-film deposition, chip packaging, and precision inspection, conventional industrial cylinders suffer from significant particulate emissions, unstable friction, oil exudation from seals, poor positioning accuracy, and strong exhaust-induced turbulence. Conventional pneumatic components are easy to produce wear particles, oil volatile impurities during operation, extremely